Below you will find pages that utilize the taxonomy term “Spare” Aixtron heater element spare On the fab floor, the Aixtron MOCVD tool doesn’t forgive thermal drift. If the heater element starts to underperform, you know it right away—wafer... Read more...
Aixtron heater element spare On the fab floor, the Aixtron MOCVD tool doesn’t forgive thermal drift. If the heater element starts to underperform, you know it right away—wafer... Read more...