http://patio-ir-comfort.com/zh/tags/%E6%B7%B1%E7%B4%AB%E5%A4%96%E7%BA%BF/ Recent content in 深紫外线 on Patio Infrared Heating Comfort Hugo zh Mon, 01 Jun 2026 17:44:52 +0800 http://patio-ir-comfort.com/zh/posts/deep-uv-duv-resist-bake-lamp/ Mon, 01 Jun 2026 17:44:52 +0800 http://patio-ir-comfort.com/zh/posts/deep-uv-duv-resist-bake-lamp/ <p><img src="http://patio-ir-comfort.com/images/e619a459508a95cd74ea4eae0be40cd1.png" alt="深紫外 DUV 光刻胶烘烤灯"></p> <p>在光刻车间，光刻胶烘烤温度波动0.2°C绝非“小偏差”，而是产量直接流失。软烘烤确定溶剂分布，硬烘烤固定图像。两者都需要热量传递具有重复性，且稳定地应用于每一片晶圆。当烘烤曲线波动时，CD<a href="https://o-yate.net">控制失效</a>，残留杂质滞留，显影后出现冲洗残留。</p>